Structural Analysis of Si(OEt)4 Deposits on Au(111)/SiO2 Substrates at Nanometer Scale using Focused Electron Beam Induced Deposition

Po-Shi Yuan, Nigel Mason, Maria Pintea +2

The focused electron beam induced deposition (FEBID) process was used by employing a Gemini SEM with a beam characteristic of 1keV and 24pA for the deposition of pillars and line s…