Molecular Beam Homoepitaxy of N-polar AlN on bulk AlN substrates

Jashan Singhal, Jimy Encomendero, Yongjin Cho +6

N-polar AlN epilayers were grown on the N-face of single crystal bulk AlN substrates by plasma assisted molecular beam epitaxy (PA-MBE). A combination of in situ thermal deoxidatio…