most citedIonized particle transport in reactive HiPIMS discharge: correlation between the energy distribution functions of neutral and ionized atoms

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physics.plasm-ph2021★ 9 cited

Ionized particle transport in reactive HiPIMS discharge: correlation between the energy distribution functions of neutral and ionized atoms

Abderzak El Farsy, Dimitri Boivin, Cédric Noel +4

We investigated the transport titanium ions produced in a reactive high-power impulse magnetron sputtering (HiPIMS) device used for TiN coating deposition. Time-resolved mass spect…