10 citations · 14 across the 2 of their papers we have counts for
2 papers
physics.optics2022★ 10 cited
High Q-Factor Silicon Nitride Nanomechanical Resonators Fabricated by Maskless Femtosecond Laser Micro-machining
Roghayeh Nikbakht, Xitong Xie, Arnaud Weck +1
Freestanding Silicon nitride (SiN) devices are central to the field of nanomechanical resonators and for other technology applications such as transmission electron imaging and nan…
physics.app-ph2021★ 4 cited
Observation of Silicon Nitride Nanomechanical Resonator Actuation Using Capacitive Substrate Excitation
Gengyang Mu, Nikaya Snell, Chang Zhang +5
We observe the actuation of silicon nitride (SiN) nanomechanical resonators by electrical excitation of metal-dielectric-semiconductor (MDS) capacitors on their supporting silicon…