21 citations · 42 across the 2 of their papers we have counts for
2 papers
physics.plasm-ph2022★ 21 cited
Electron dynamics in planar radio frequency magnetron plasmas: I. The mechanism of Hall heating and the μ-mode
Denis Eremin, Dennis Engel, Dennis Krüger +9
The electron dynamics and the mechanisms of power absorption in radio-frequency (RF) driven, magnetically enhanced capacitively coupled plasmas (MECCPs) at low pressure are investi…
physics.plasm-ph2022★ 21 cited
Electron dynamics in planar radio frequency magnetron plasmas: II. Heating and energization mechanisms studied via a 2d3v particle-in-cell/Monte Carlo code
D. Eremin, B. Berger, D. Engel +10
The present work investigates electron transport and heating mechanisms using an (r, z) particle-in-cell (PIC) simulation of a typical rf-driven axisymmetric magnetron discharge wi…