Enhancing the Electron Mobility in Si-doped (010) $\beta$-Ga${}_2$O${}_3$ films with Low-Temperature Buffer Layers

Arkka Bhattacharyya, Carl Peterson, Takeki Itoh +6

We demonstrate a new substrate cleaning and buffer growth scheme in $\beta$-Ga${}_2$O${}_3$ epitaxial thin films using metalorganic vapor phase epitaxy (MOVPE). For the channel structure,…