Face-to-face anneal temperature controls lattice parameter in Ta(C,N) virtual substrates for AlGaN power electronics

Noah Zahn, Julia L. Martin, Michelle A. Smeaton +3

Tantalum carbide (TaC) thin film ''virtual'' substrates are a highly desirable material for ${\text{Al}}_{0.5}{\text{Ga}}_{0.5}\text{N}$ vertical power electronics devices due to latti…