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20102013
most citedTantalum nitride superconducting single-photon detectors with low cut-off energy

100 citations · 241 across the 5 of their papers we have counts for

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cond-mat.mes-hall2010

Symbiotic Optimization of the Nanolithography and RF-Plasma Etching for Fabricating High-Quality Light-Sensitive Superconductors on the 50 nm Scale

H. Bartolf, K. Inderbitzin, L. B. Gómez +6

We present results of a fabrication-process development for the lithographic pattern transfer into the sub-100nm range by combining electron-beam lithography and reactive dry etchi…