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20102018
most citedProximity effect model of ultra-narrow NbN strips

27 citations · 48 across the 3 of their papers we have counts for

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cond-mat.mes-hall2010

Symbiotic Optimization of the Nanolithography and RF-Plasma Etching for Fabricating High-Quality Light-Sensitive Superconductors on the 50 nm Scale

H. Bartolf, K. Inderbitzin, L. B. Gómez +6

We present results of a fabrication-process development for the lithographic pattern transfer into the sub-100nm range by combining electron-beam lithography and reactive dry etchi…