ALD W-Doped SnO${}_2$ TFTs for Indium-Free BEOL Electronics

Mansi Anil Patil, Devarshi Dhoble, Shivaram Kubakaddi +4

This work reports back-end-of-line (BEOL) compatible, thin-film transistors (TFTs) with sub-10 nm tungsten-doped tin oxide (TWO) channels deposited by atomic layer deposition (ALD)…