34 citations · 54 across the 2 of their papers we have counts for
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Harry Alles, Jaan Aarik, Aleks Aidla +8
Atomic layer deposition of ultrathin HfO2 on unmodified graphene from HfCl4 and H2O was investigated. Surface RMS roughness down to 0.5 nm was obtained for amorphous, 30 nm thick h…