Mass Spectrometry Studies of Hydrogen Ions Energy Distributions in an ECR- based Large Volume Plasma Source

Bibekananda Naik, Ramesh Narayanan, Debaprasad Sahu +2

Plasma is produced in a Large Volume Plasma Source (LVPS; dia. = 1 m, height = 1m) using CW microwaves (= 400 - 600 W, 2.45 GHz), in a compact ECR plasma source (CEPS) attached to…