most citedNanoscale Three-Dimensional Imaging of Integrated Circuits using a Scanning Electron Microscope and Transition-Edge Sensor Spectrometer

3 citations · 3 across the 1 of their papers we have counts for

collaborators

1 paper

physics.ins-det2022★ 3 cited

Nanoscale Three-Dimensional Imaging of Integrated Circuits using a Scanning Electron Microscope and Transition-Edge Sensor Spectrometer

Nathan Nakamura, Paul Szypryt, Amber L. Dagel +30

X-ray nanotomography is a powerful tool for the characterization of nanoscale materials and structures, but is difficult to implement due to competing requirements on X-ray flux an…