Heterostructure films of SiO${}_2$ and HfO${}_2$ for high power laser optics prepared by plasma-enhanced atomic layer deposition

Shawon Alam, Pallabi Paul, Vivek Beladiya +11

Absorption losses and laser-induced damage threshold (LIDT) are considered as the major constraint for the development of optical coatings for high-power laser optics. Such coating…