3 papers
physics.ins-det2022
A tabletop x-ray tomography instrument for nanometer-scale imaging: demonstration of the 1,000-element transition-edge sensor subarray
Paul Szypryt, Nathan Nakamura, Daniel T. Becker +28
We report on the 1,000-element transition-edge sensor (TES) x-ray spectrometer implementation of the TOMographic Circuit Analysis Tool (TOMCAT). TOMCAT combines a high spatial reso…
physics.ins-det2022
Design of a 3000-pixel transition-edge sensor x-ray spectrometer for microcircuit tomography
Paul Szypryt, Douglas A. Bennett, William J. Boone +28
Feature sizes in integrated circuits have decreased substantially over time, and it has become increasingly difficult to three-dimensionally image these complex circuits after fabr…
physics.ins-det2022
Nanoscale Three-Dimensional Imaging of Integrated Circuits using a Scanning Electron Microscope and Transition-Edge Sensor Spectrometer
Nathan Nakamura, Paul Szypryt, Amber L. Dagel +30
X-ray nanotomography is a powerful tool for the characterization of nanoscale materials and structures, but is difficult to implement due to competing requirements on X-ray flux an…