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physics.app-ph2023★ 2 cited

Effect of Annealing Temperature on Minimum Domain Size of Ferroelectric Hafnia

Seokjung Yun, Hoon Kim, Myungsoo Seo +7

Here, we optimized the annealing temperature of HZO/TiN thin film heterostructure via multiscale analysis of remnant polarization, crystallographic phase, minimum ferroelectric dom…