Experimental System Identification and Disturbance Observer-based Control for a Monolithic $Z{\theta }_x{\theta }_y$ Precision Positioning System

Mohammadali Ghafarian, Bijan Shirinzadeh, Ammar Al-Jodah +2

A compliant parallel micromanipulator is a mechanism in which the moving platform is connected to the base through a number of flexural components. Utilizing parallel-kinematics co…