Highly uniform first-electron position in qubit arrays fabricated on dedicated QSOI(R) 300mm commercial platform

Johan Pelloux-Prayer, Elise Prin, Giselle A. Elbaz +11

We report progress toward the development of a quantum silicon-on-insulator (QSOI(R)) technology compatible with 300mm CMOS fabrication and adapted from the 28nm Fully-Depleted SOI…