3 citations · 3 across the 2 of their papers we have counts for
2 papers
physics.plasm-ph2011★ 3 cited
Deposition of SiOx films by means of atmospheric pressure microplasma jets
Jan Benedikt, Rüdiger Reuter, Dirk Ellerweg +2
Atmospheric pressure plasma jet sources are currently in the focus of many researchers for their promising applications in medical industry (e.g. treatment of living tissues), surf…
physics.plasm-ph2011
The role of oxygen and surface reactions in the deposition of silicon oxide like films from HMDSO at atmospheric pressure
R. Reuter, K. Rügner, D. Ellerweg +3
The deposition of thin SiOCH or SiOH films by means of atmospheric pressure microplasma jets with admixture of Hexamethyldisiloxane (HMDSO) and oxygen and the r…