3 citations · 3 across the 3 of their papers we have counts for
3 papers
physics.plasm-ph2011★ 3 cited
Deposition of SiOx films by means of atmospheric pressure microplasma jets
Jan Benedikt, Rüdiger Reuter, Dirk Ellerweg +2
Atmospheric pressure plasma jet sources are currently in the focus of many researchers for their promising applications in medical industry (e.g. treatment of living tissues), surf…
physics.plasm-ph2011
Diagnostics of low and atmospheric pressure plasmas by means of mass spectrometry
Jan Benedikt, Dirk Ellerweg, Achim von Keudell
The knowledge of absolute fluxes of reactive species such as radicals or energetic ions to the surface is crucial for understanding the growth or etching of thin films. These speci…
physics.plasm-ph2011
Understanding Microplasmas
J. Winter, J. Benedikt, M. Böke +8
Microplasmas are operated around atmospheric pressure exhibiting pronounced non-equilibrium characteristics, i.e. they possess energetic electrons while ions and neutrals remain co…