293 citations · 1.4k across the 68 of their papers we have counts for
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physics.plasm-ph2018★ 54 cited
Multi frequency matching for voltage waveform tailoring
Frederik Schmidt, Julian Schulze, Erik Johnson +5
Customized voltage waveforms composed of a number of frequencies and used as the excitation of radio-frequency plasmas can control various plasma parameters such as energy distribu…
physics.plasm-ph2018★ 40 cited
Consistent simulation of capacitive radio-frequency discharges and external matching networks
Frederik Schmidt, Thomas Mussenbrock, Jan Trieschmann
External matching networks are crucial and necessary for operating capacitively coupled plasmas in order to maximize the absorbed power. Experiments show that external circuits in…