293 citations · 1.4k across the 68 of their papers we have counts for
3 papers · 2 filters
A New Hybrid Scheme for Simulations of Highly Collisional RF-Driven Plasmas
Denis Eremin, Torben Hemke, Thomas Mussenbrock
This work describes a new 1D hybrid approach for modeling atmospheric pressure discharges featuring complex chemistry. In this approach electrons are described fully kinetically us…
Kinetic Interpretation of Resonance Phenomena in Low Pressure Capacitively Coupled Radio Frequency Plasmas
S. Wilczek, J. Trieschmann, D. Eremin +8
The kinetic origin of resonance phenomena in capacitively coupled radio frequency plasmas is discovered based on particle-based numerical simulations. The analysis of the spatio-te…
Transport of Sputtered Particles in Capacitive Sputter Sources
Jan Trieschmann, Thomas Mussenbrock
The transport of sputtered aluminum inside a multi frequency capacitively coupled plasma chamber is simulated by means of a kinetic test multi-particle approach. A novel consistent…