376 citations · 1.1k across the 35 of their papers we have counts for
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PECVD and PEALD on polymer substrates (Part II): Understanding and tuning of barrier and membrane properties of thin films
Teresa de los Arcos, Peter Awakowicz, Marc Böke +19
This feature article presents insights concerning the correlation of PECVD and PEALD thin film structures with their barrier or membrane properties. While in principle similar prec…
Nonlocal dynamics of secondary electrons in capacitively coupled radio frequency discharges
Katharina Noesges, Maximilian Klich, Aranka Derzsi +5
In capacitively coupled radio frequency (CCRF) discharges, the interaction of the plasma and the surface boundaries is linked to a variety of highly relevant phenomena for technolo…
Generation of energetic electrons by surface waves in VHF CCPs
D. Eremin, E. Kemaneci, M. Matsukuma +3
Capacitively coupled plasmas (CCP) comprise one of the main tool in active use in the plasma processing industry. However, increasing the driving frequency and electrode size is li…