98 citations · 663 across the 36 of their papers we have counts for
Showing 2015 · physics.plasm-phShow all
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physics.plasm-ph2015★ 87 cited
Kinetic Interpretation of Resonance Phenomena in Low Pressure Capacitively Coupled Radio Frequency Plasmas
S. Wilczek, J. Trieschmann, D. Eremin +8
The kinetic origin of resonance phenomena in capacitively coupled radio frequency plasmas is discovered based on particle-based numerical simulations. The analysis of the spatio-te…
physics.plasm-ph2015★ 22 cited
Transport of Sputtered Particles in Capacitive Sputter Sources
Jan Trieschmann, Thomas Mussenbrock
The transport of sputtered aluminum inside a multi frequency capacitively coupled plasma chamber is simulated by means of a kinetic test multi-particle approach. A novel consistent…