98 citations · 663 across the 36 of their papers we have counts for
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Towards a Machine-Learned Poisson Solver for Low-Temperature Plasma Simulations in Complex Geometries
Ihda Chaerony Siffa, Markus M. Becker, Klaus-Dieter Weltmann +1
Poisson's equation plays an important role in modeling many physical systems. In electrostatic self-consistent low-temperature plasma (LTP) simulations, Poisson's equation is solve…
An efficient plasma-surface interaction surrogate model for sputtering processes based on autoencoder neural networks
Tobias Gergs, Borislav Borislavov, Jan Trieschmann
Simulations of thin film sputter deposition require the separation of the plasma and material transport in the gas-phase from the growth/sputtering processes at the bounding surfac…
Continuum and Kinetic Simulations of the Neutral Gas Flow in an Industrial Physical Vapor Deposition Reactor
Kirsten Bobzin, Ralf Peter Brinkmann, Thomas Mussenbrock +4
Magnetron sputtering used for physical vapor deposition processes often requires gas pressures well below 1 Pa. Under these conditions the gas flow in the reactor is usually determ…