most citedDeposition of SiOx films by means of atmospheric pressure microplasma jets

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physics.plasm-ph2011

The mystery of O and O3 production in the effluent of a He/O2 atmospheric pressure microplasma jet

Dirk Ellerweg, Achim von Keudell, Jan Benedikt

Microplasma jets are commonly used to treat samples in ambient air atmosphere. The effect of admixing air into the effluent may severely affect the composition of the emerging spec…

physics.plasm-ph2011

The role of VUV radiation in the inactivation of bacteria with an atmospheric pressure plasma jet

Simon Schneider, Jan-Wilm Lackmann, Dirk Ellerweg +4

A modified version of a micro scale atmospheric pressure plasma jet (μ-APPJ) source, so-called X-Jet, is used to study the role of plasma generated VUV photons in the inactivation…

physics.plasm-ph2011★ 3 cited

Deposition of SiOx films by means of atmospheric pressure microplasma jets

Jan Benedikt, Rüdiger Reuter, Dirk Ellerweg +2

Atmospheric pressure plasma jet sources are currently in the focus of many researchers for their promising applications in medical industry (e.g. treatment of living tissues), surf…

physics.plasm-ph2011

Diagnostics of low and atmospheric pressure plasmas by means of mass spectrometry

Jan Benedikt, Dirk Ellerweg, Achim von Keudell

The knowledge of absolute fluxes of reactive species such as radicals or energetic ions to the surface is crucial for understanding the growth or etching of thin films. These speci…

physics.plasm-ph2011

Understanding Microplasmas

J. Winter, J. Benedikt, M. Böke +8

Microplasmas are operated around atmospheric pressure exhibiting pronounced non-equilibrium characteristics, i.e. they possess energetic electrons while ions and neutrals remain co…