Direct laser micromachining of superconducting terahertz Josephson plasma emitters

Reo Yamaguchi, Takuma Sakurai, Kazuhiro Yamaki +6

We demonstrate a rapid, maskless fabrication method for superconducting terahertz Josephson plasma emitters (JPEs) based on direct ultraviolet laser micromachining of Bi${}_2$Sr${}_2$C…