most citedProcess Optimization and Downscaling of a Single Electron Single Dot Memory

3 citations · 3 across the 1 of their papers we have counts for

collaborators

1 paper

cond-mat.mtrl-sci2011★ 3 cited

Process Optimization and Downscaling of a Single Electron Single Dot Memory

Christophe Krzeminski, Xiaohui Tang, Nicolas Reckinger +2

This paper presents the process optimization of a single-electron nanoflash electron memory. Self-aligned single dot memory structures have been fabricated using a wet anisotropic…