most citedNanometer scale elemental analysis in the helium ion microscope using time of flight spectrometry

54 citations · 54 across the 2 of their papers we have counts for

collaborators

2 papers

cond-mat.mtrl-sci2023

Fabrication of Specimens for Atom Probe Tomography Using a Combined Gallium and Neon Focused Ion Beam Milling Approach

Frances I. Allen, Paul T. Blanchard, Russell Lake +6

We demonstrate a new focused ion beam sample preparation method for atom probe tomography. The key aspect of the new method is that we use a neon ion beam for the final tip-shaping…

physics.ins-det2015★ 54 cited

Nanometer scale elemental analysis in the helium ion microscope using time of flight spectrometry

Nico Klingner, René Heller, Gregor Hlawacek +4

Time of flight backscattering spectrometry (ToF-BS) was successfully implemented in a helium ion microscope (HIM). Its integration introduces the ability to perform laterally resol…