4.2k citations · 44.5k across the 134 of their papers we have counts for
1 paper · 1 filter
C. Malhaire, M. Granata, D. Hofman +5
In this work, optical profilometry and finite-element simulations are applied on buckled micro-machined membranes for the stress analysis of ion-beam-sputtered $\mathrm{Ta_{2}O_{5}…