most citedModeling of very high frequency large-electrode capacitively coupled plasmas with a fully electromagnetic particle-in-cell code

19 citations · 19 across the 2 of their papers we have counts for

collaborators

2 papers

physics.plasm-ph2023

Generation of energetic electrons by surface waves in VHF CCPs

D. Eremin, E. Kemaneci, M. Matsukuma +3

Capacitively coupled plasmas (CCP) comprise one of the main tool in active use in the plasma processing industry. However, increasing the driving frequency and electrode size is li…

physics.plasm-ph2022★ 19 cited

Modeling of very high frequency large-electrode capacitively coupled plasmas with a fully electromagnetic particle-in-cell code

D. Eremin, E. Kemaneci, M. Matsukuma +2

Phenomena taking place in capacitively coupled plasmas with large electrodes and driven at very high frequencies are studied numerically utilizing a novel energy- and charge-conser…