Flat silicon gradient index lens with deep reactive-ion-etched 3-layer anti-reflection structure for millimeter and submillimeter wavelengths

Fabien Defrance, Cecile Jung-Kubiak, John Gill +5

We present the design, fabrication, and characterization of a 100 mm diameter, flat, gradient-index (GRIN) lens fabricated with high-resistivity silicon, combined with a three-laye…