Reduction of helium permeation in microfabricated cells using aluminosilicate glass substrates and Al${}_2$O${}_3$ coatings

C. Carlé, S. Keshavarzi, A. Mursa +10

The stability and accuracy of atomic devices can be degraded by the evolution of their cell inner atmosphere. Hence, the undesired entrance or leakage of background or buffer gas,…