4 citations · 7 across the 6 of their papers we have counts for
4 papers · 1 filter
An Evaluation of Continual Learning for Advanced Node Semiconductor Defect Inspection
Amit Prasad, Bappaditya Dey, Victor Blanco +1
Deep learning-based semiconductor defect inspection has gained traction in recent years, offering a powerful and versatile approach that provides high accuracy, adaptability, and e…
Addressing Class Imbalance and Data Limitations in Advanced Node Semiconductor Defect Inspection: A Generative Approach for SEM Images
Bappaditya Dey, Vic De Ridder, Victor Blanco +2
Precision in identifying nanometer-scale device-killer defects is crucial in both semiconductor research and development as well as in production processes. The effectiveness of ex…
Towards Improved Semiconductor Defect Inspection for high-NA EUVL based on SEMI-SuperYOLO-NAS
Ying-Lin Chen, Jacob Deforce, Vic De Ridder +4
Due to potential pitch reduction, the semiconductor industry is adopting High-NA EUVL technology. However, its low depth of focus presents challenges for High Volume Manufacturing.…
Automated Semiconductor Defect Inspection in Scanning Electron Microscope Images: a Systematic Review
Thibault Lechien, Enrique Dehaerne, Bappaditya Dey +4
A growing need exists for efficient and accurate methods for detecting defects in semiconductor materials and devices. These defects can have a detrimental impact on the efficiency…