most citedOn the rank of Hankel matrices over finite fields

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physics.chem-ph2023★ 1 cited

Orientation dependent etching of silicon by fluorine molecules: a quantum chemistry computational study

Omesh Dhar Dwivedi, Yuri Barsukov, Sierra Jubin +2

Anisotropic etching is a widely used process in semiconductor manufacturing, in particular for micro- and nano-scale texturing of silicon surfaces for black silicon production. The…