2 papers
physics.plasm-ph2023
Azimuthal ion movement in HiPIMS plasmas -- Part II: lateral growth fluxes
Steffen Schüttler, Sascha Thiemann-Monje, Julian Held +1
The transport of sputtered species from the target of a magnetron plasma to a collecting surface at the circumference of the plasma is analyzed using a particle tracer technique. A…
physics.plasm-ph2023
Azimuthal ion movement in HiPIMS plasmas -- Part I: velocity distribution function
S. Thiemann-Monjé, J. Held, S. Schüttler +2
Magnetron sputtering discharges feature complex magnetic field configurations to confine the electrons close to the cathode surface. This magnetic field configuration gives rise to…