most citedSystematic investigation of wear-induced cold welding in ultrahigh vacuum piezoelectric motors with non-metallic coatings

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physics.app-ph2023★ 6 cited

Systematic investigation of wear-induced cold welding in ultrahigh vacuum piezoelectric motors with non-metallic coatings

Taemin Ahn, Sungmin Song, Ungdon Ham +1

Piezoelectric motors are widely used in various applications where both precision positioning and miniaturization are required. Either inertial or quasi-static motors are commonly…