Particle-in-cell simulation of a 50~mTorr capacitively coupled argon discharge over a range of frequencies

Saurabh Simha, Sarveshwar Sharma, Alexander Khrabrov +3

The effect of driving frequency in the range of 13.56 MHz to 73 MHz on electron energy distribution and electron heating modes in a 50 mTorr capacitively coupled argon plasma disch…