most citedElectrochemical etching strategy for shaping monolithic 3D structures from 4H-SiC wafers

7 citations · 7 across the 1 of their papers we have counts for

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1 paper

cond-mat.mes-hall2023★ 7 cited

Electrochemical etching strategy for shaping monolithic 3D structures from 4H-SiC wafers

André Hochreiter, Fabian Groß, Morris-Niklas Möller +2

Silicon Carbide (SiC) is an outstanding material, not only for electronic applications, but also for projected functionalities in the realm of photonic quantum technologies, nano-m…