most citedNitrogen flow rate dependent atomic coordination, phonon vibration and surface analysis of DC Magnetron sputtered Nitrogen rich-AlN thin films

14 citations · 14 across the 1 of their papers we have counts for

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1 paper

cond-mat.mtrl-sci2023★ 14 cited

Nitrogen flow rate dependent atomic coordination, phonon vibration and surface analysis of DC Magnetron sputtered Nitrogen rich-AlN thin films

Aishwarya Madhuri, Sanketa Jena, Mukul Gupta +1

In this work, the effect on crystallite orientation, surface morphology, fractal geometry, structural coordination and electronic environment of DC magnetron sputtered AlN films we…