2 papers
physics.app-ph2023
Nanometer displacement measurement based on metrological self-mixing grating interferometer traceable to the pitch standard of one-dimension chromium self-traceable grating
Zhenjie Gu, Zhangning Xie, Zhikun Chang +10
Traceability of precision instrument and measuring method is the core issue in metrology science. In the field of nanometer length measurement, the laser interferometers are usuall…
physics.ins-det2023
Chromium Self-Traceable Length Standard: Investigating Geometry and Diffraction for Length Traceability Chain
Zichao Lin, Yulin Yao, Zhangning Xie +9
Natural constant-based metrology methods offer an effective approach to achieving traceability in nanometric measurements. The Cr grating, fabricated by atom lithography and featur…