3 papers
cond-mat.soft2023
PECVD and PEALD on polymer substrates (Part II): Understanding and tuning of barrier and membrane properties of thin films
Teresa de los Arcos, Peter Awakowicz, Marc Böke +19
This feature article presents insights concerning the correlation of PECVD and PEALD thin film structures with their barrier or membrane properties. While in principle similar prec…
cond-mat.soft2023
PECVD and PEALD on polymer substrates (part I): Fundamentals and analysis of plasma activation and thin film growth
Teresa de los Arcos, Peter Awakowicz, Jan Benedikt +17
This feature article considers the analysis of the initial states of film growth on polymer substrates. The assembled results are based on the cooperation between research groups i…
cond-mat.mtrl-sci2023
Ultrashort Pulse Laser Annealing of Amorphous Atomic Layer Deposited MoS Films
Malte J. M. J. Becher, Julia Jagosz, Rahel-Manuela Neubieser +6
Thin films of molybendum disulfide grown via thermal atomic layer deposition at low temperatures, suitable for temperature sensible substrates, can be amorphous. To avoid a high te…