1 citations · 1 across the 3 of their papers we have counts for
3 papers
cond-mat.soft2023★ 1 cited
PECVD and PEALD on polymer substrates (Part II): Understanding and tuning of barrier and membrane properties of thin films
Teresa de los Arcos, Peter Awakowicz, Marc Böke +19
This feature article presents insights concerning the correlation of PECVD and PEALD thin film structures with their barrier or membrane properties. While in principle similar prec…
physics.plasm-ph2013
Particle beam experiments for the investigation of plasma-surface interactions: application to magnetron sputtering and polymer treatment
Carles Corbella, Simon Grosse-Kreul, Oliver Kreiter +3
A beam experiment is presented to study heterogeneous reactions relevant to plasma-surface interactions. Atom and ion beams are focused onto the sample to expose it to quantified b…
physics.plasm-ph2011
The role of oxygen and surface reactions in the deposition of silicon oxide like films from HMDSO at atmospheric pressure
R. Reuter, K. Rügner, D. Ellerweg +3
The deposition of thin SiOCH or SiOH films by means of atmospheric pressure microplasma jets with admixture of Hexamethyldisiloxane (HMDSO) and oxygen and the r…