Extending Electrical Resistivity Measurements in Micro-scratching of Silicon to Determine Thermal Conductivity of the Metallic Phase Si-II

Hisham A. Abdel-Aal, Ysai Reyes, John A. Patten +1

Ductile Regime Machining of semiconductors (DRM) offers higher quality of the resulting surfaces. To optimize this process, it is required to understand the thermal kinetics of sil…