6 citations · 6 across the 3 of their papers we have counts for
3 papers
A hybrid polymer/ceramic/semiconductor fabrication platform for high-sensitivity fluid-compatible MEMS devices with sealed integrated electronics
Nahid Hosseini, Matthias Neuenschwander, Jonathan D. Adams +7
Active microelectromechanical systems can couple the nanomechanical domain with the electronic domain by integrating electronic sensing and actuation mechanisms into the micromecha…
Superconductivity in the system prepared by focused ion beam induced deposition
Paul M. Weirich, Christian H. Schwalb, Marcel Winhold +1
We have prepared the new amorphous superconductor with a maximum critical temperature of 3.8\,K by the direct-write nano-patterning technique of focused…
In-situ growth optimization in focused electron-beam induced deposition
Paul M. Weirich, Marcel Winhold, Christian H. Schwalb +1
We present the application of an evolutionary genetic algorithm for the in-situ optimization of nanostructures prepared by focused electron-beam-induced deposition. It allows us to…