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Yi-Shi Xu

1 paper hereh-index 3124 citations5 works total

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author position
  • middle author1

Across the 1 of 1 paper where every author was matched, so the position is known.

fields
  • physics.optics1

identity via Semantic Scholar / OpenAlex

most citedSuper stealth dicing of transparent solids with nanometric precision

119 citations · 119 across the 1 of their papers we have counts for

collaborators

1 paper

physics.optics2023★ 119 cited

Super stealth dicing of transparent solids with nanometric precision

Zhen-Ze Li, Hua Fan, Lei Wang +9

Laser cutting of semiconductor wafers and transparent dielectrics has become a dominant process in manufacturing industries, encompassing a wide range of applications from flat dis…

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Not affiliated with arXiv. Researcher data from Semantic Scholar (ODC-BY) and OpenAlex.