Thermophysical Characteristics of the Porous Silicon Samples Formed by Electrochemical, Chemical and Combined Etching Methods

B. Zhumabay, R. Dagarbek, D. Kantarbayeva +6

The article addresses the thermophysical properties of porous silicon (PS) samples produced through electrochemical (EC), metal-assisted chemical (MACE), and combined (MACE + EC) e…