Self-Focusing Control for Depth-Precise Wafer Slicing of 4H-SiC in Femtosecond Laser Processing

Dong Hee Kang, Jaeseung Lim, Mishfaqur Rahman +4

4H-SiC has emerged as a third-generation chip material because its superior thermal conductivity and high breakdown field enable the material to achieve high power density and high…