68 citations · 121 across the 4 of their papers we have counts for
4 papers
Time resolved measurement of film growth during reactive high power pulsed magnetron sputtering (HIPIMS) of titanium nitride
Felix Mitschker, Marina Prenzel, Jan Benedikt +2
The growth rate during reactive high power pulsed magnetron sputtering (HIPIMS) of titanium nitride is measured with a temporal resolution of up to 25 us using a rotating shutter c…
Argon metastable dynamics in a filamentary jet micro-discharge at atmospheric pressure
B Niermann, R Reuter, T Kuschel +3
Space and time resolved concentrations of Ar () metastable atoms at the exit of an atmospheric pressure radio-frequency micro-plasma jet were measured using tunable diode…
Separation of VUV/UV photons and reactive particles in the effluent of a He/O2 atmospheric pressure plasma jet
S. Schneider, J. -W. Lackmann, F. Narberhaus +3
Cold atmospheric pressure plasmas can be used for treatment of living tissues or for inactivation of bacteria or biological macromolecules. The treatment is usually characterized b…
The role of oxygen and surface reactions in the deposition of silicon oxide like films from HMDSO at atmospheric pressure
R. Reuter, K. Rügner, D. Ellerweg +3
The deposition of thin SiOCH or SiOH films by means of atmospheric pressure microplasma jets with admixture of Hexamethyldisiloxane (HMDSO) and oxygen and the r…