collaborators

1 paper

eess.SY2026

Precision Specimen Positioning in Electron Microscopy through Hysteresis Compensation, Iterative Learning, and Vision-Based Sensing

J. S. van Hulst, A. M. C. de Peffer, D. Herceg +4

Electron microscopy requires nanometer-scale specimen positioning over a long stroke. Piezo-stepper actuators are well suited for this task, but their accuracy is limited by hyster…